Thermometric vapor sensor with evaporation surface having micropores

ABSTRACT

A sensor for sensing in a gas stream a vapor of a liquid. The sensor includes a micropore and a wet temperature sensor. The micropore has an evaporation end and has a lumen to conduct liquid from a supply of the liquid for evaporation at the evaporation end. The wet temperature sensor has a heat sensitive part in contact with the liquid in the micropore. The heat sensitive part circumscribes the micropore and forms part of the lumen. Heat loss due to evaporation of the liquid when the wet temperature sensor wet with the liquid is placed in the gas stream will result in the temperature sensed by the wet temperature sensor being lower than the non-evaporative temperature of the gas stream. This lowering in temperature can be measured to determine the concentration of the vapor in the gas stream. An example of such a sensor has a thermocouple junction having micropores passing through the thermocouple junction.

FIELD OF THE INVENTION

The present invention is related to techniques for determining theconcentration of a vapor in a gas stream and, more particularly, toapparatuses and methods for determining vapor concentration in a gasstream by measuring evaporative cooling in the gas stream.

BACKGROUND

The measurement of the concentration of a vapor in a gas is important inmany situations. For example, it is useful to know the concentration offlammable gases in a gas stream in combustion technology. The humidityof air in an area is of interest to people concerned about the weather.In an organic chemical manufacturing facility, monitoring theconcentration of vapors of certain volatile liquids in air is criticalto the safety of the personnel in the area. Further, to assess thephysiological condition of a patient in surgery, an anesthesiologistwould want to know the concentration of an anesthetic in a gas streamadministered to the patient. The concentration of water vapor in theexhaled air of a person can indicate the functioning condition of theperson's respiratory system. The detection of temperature and moisturecontent of air being inhaled and exhaled will provide valuableinformation to health care professionals on aerosol therapy andtoxicology of toxic gases inhalation.

Vapor concentration sensors based on measuring the mass of vaporabsorbed on polymer films coated on surface acoustic wave devices havebeen developed. For example, Jay W. Grate and Mark Kluxty, Anal. Chem.,vol. 63, pp 1719-1727 (1991), describe a humidity sensor in which vaporabsorption changes the frequency of oscillation of mass-sensitiveresonators. Also, Polymer-based impedance effect humidity sensors aredisclosed by S. Tsuchitani et al. in “A humidity sensor using ioniccopolymer and its application to a humidity—temperature sensor module,”Sensors and Actuators, Vol. 15, No. 4, pp 375-386, 1988. In theTsuchitani humidity sensors, moisture absorption by ionic copolymerscauses a change in impedance in an electrical circuit, thereby causing achange in oscillation frequency. However, vapor concentration sensors byvapor absorption are not very specific and are subject to interferenceby any absorbable vapor that has not been present in samples used forthe calibration of the vapor absorption sensors. Moreover, such vaporsensors do not work well near the condensation point because they maynot respond to a fall in humidity quickly. Therefore, a need exists fora highly specific vapor concentration sensor that will function over awide range of concentrations.

Humidity sensors have been used for many years to determine air humidityfor weather reporting. For such applications, one simple kind ofhumidity sensor has a dry bulb thermometer and a wet bulb thermometer.The wet bulb thermometer has a thermometer with a bulb moistened by awick. Generally water passes by capillary action against gravity up thewick from a container. Water evaporates from the wick when the air isunsaturated with respect to water vapor. Due to the cooling effect ofwater evaporating from the wick, the temperature of the wet thermometerwill be lower than the true temperature of the air had there been noevaporation. The temperature of the wet thermometer is known as the“wet-bulb temperature.” The temperature that is measured by a drythermometer, known as the “dry-bulb temperature,” and the wet-bulbtemperature are used to determine the humidity in air. See, for example,McCabe and Smith, Unit Operations of Chemical Engineering, McGraw-Hill,Ch. 24, 3rd ed., (1956). Such humidity sensors tend to be large. Theirresponse time is typically not very fast.

More recently, moisture sensors employing micro-thermocouple sensors fordetermining temperature and relative humidity in airstream have beenreported, for example, in “Design and development of amicro-thermocouple sensor for determining temperature and relativehumidity patterns within an airstream,” J. Biomechan. Eng Vol. 111, PP.283-287, Nov. 1989. In such a device, a wet-bulb thermocouple junctionis coated with a sprayed-on boron nitride coating, which is reported tobe hard and porous. A sleeve is used to supply water to the boronnitride coating. It would appear that coating a thermocouple junction byspraying is not an easy task and one has to take special care toposition the sleeve precisely to wet the boron nitride coating withoutleakage. It is also difficult to form a boron nitride coating that isstable on metal or glass surfaces. Moreover, to get a porous structuresuitable for conducting water adequately one needs to form a boronnitride layer that is quite thick, making it brittle and slow totransfer heat.

Therefore, a need exists for a vapor concentration sensor that isrelatively simple to construct, and particularly for a vaporconcentration sensor that is sturdy. Recently, we reported a vaporsensor employing micropores, see U.S. patent application Ser. No.08/878,566, “THERMOMETRIC APPARATUS AND METHOD FOR DETERMINING THECONCENTRATION OF A VAPOR IN A GAS STREAM,” filed on Jun. 19, 1997,Attorney Docket No. 10951173-1, which is incorporated by reference inits entirely herein. However, there is still a need for a vapor sensorthat is rugged, simple to make, and can be produced in a small size.

SUMMARY

In one aspect, the present invention provides a sensor for sensing theconcentration of a vapor of a vaporizable liquid in a gas stream. Anembodiment of the sensor includes a micropore which has an opening intothe gas stream. The micropore has an evaporation end at the opening intothe gas stream and a lumen which conducts the vaporizable liquid from asupply of thy liquid to the opening for evaporation at the evaporationend. A wet-transducer temperature sensor (or simply “wet temperaturesensor”) capable of sensing temperature at the evaporative end of themicropore. The wet temperature sensor has a heat sensitive part incontact with the liquid in the micropore near the opening. That heatsensitive part circumscribes the micropore and forms part of the lumen.When the liquid evaporates, the latent heat of evaporation is absorbedfrom the gas stream and the surroundings thereof, resulting in thecooling of the vicinity of the wet temperature sensor. Such heat losswhen the wet temperature sensor wet with the liquid is placed in the gasstream will result in the temperature sensed by the wet temperaturesensor being lower than the non-evaporative temperature of the gasstream. This lowering in temperature can be measured to determine theconcentration of the vapor in the gas stream.

To determine the lowering in temperature described above, in anembodiment, a dual-transducer temperature sensor is provided to comparethe wet-transducer temperature to the gas stream temperature. In such adual-transducer temperature sensor, a wet-transducer temperature sensorsenses the temperature at the evaporative surface and a referencetemperature sensor senses the gas temperature without evaporation as areference.

In an embodiment, multiple micropores can be included to increase thearea of evaporation such that steady state temperature can be achievedfor determining the vapor concentration quickly. Due to the ability toform micropores of uniform size and shape, and to form small temperaturesensors with thin layers of material, fast heat transfer can be achievedto enable fast response time for vapor sensing. Since the micropores aresmall, capillary action can hold the liquid in the micropores even whenthe temperature sensors are turned in different orientations. Thus, withthe present invention, a fast vapor concentration sensor can be made,even for applications that require small dimensions and independence tothe position relative to gravity.

The sensor of the present invention is advantageous over conventionalsensors with woven wicks. First, regarding woven wicks, it is difficultto form a woven material that can wrap uniformly around a temperaturesensitive unit such as a thermistor head or thermocouple junction toprovide adequate liquid without dripping. Also, there may be a tendencyfor fibrous material to become unwoven and come off, which is notdesirable in certain applications, such as in an airway of a patient.Similarly, materials that are brittle and fragile, such a boron nitride,may flake off, which would lead to undesirable patterns of heat and masstransfer as well. In conventional wick-type humidity sensors, water isdrawn against gravity by capillary action through a fibrous wick fromwater in a container to a thermometer. This is not conducive for usingthe humidity sensor in hard-to-reach places since the water containerand the wick render the wet-bulb thermometer hard to position. Awickless embodiment of a vapor concentration sensor according to thepresent invention can be used in hard-to-reach places such as the airwayof a patient. As used herein, the term “wickless” means the lack of afibrous material that conducts liquid by capillary action againstgravity from a liquid container.

Sensors can be made according to the present invention to be highlyspecific to the vapor for which the concentration information isdesired. For example, an alcohol vapor concentration sensor can be madeby providing micropore(s) in contact with a wet-transducer temperaturesensor with alcohol. Such a vapor concentration sensor will operate wellto measure the concentration of alcohol in a gas stream despite thepresence of other vapors in the gas stream. The driving force for theevaporation of alcohol at the wet junction is independent of the vaporpressure of other volatiles in the gas stream. Such specific sensors areadvantageous over absorption vapor concentration sensors because therate of vapor absorption of such absorption vapor concentration sensorsis affected by the presence of other vapors in the gas. Anotheradvantage of the sensor of the present invention is that a vapor sensorcan be made for sensing a few different vapors, by having microporesthat conduct different liquids from reservoirs to differentwet-transducer temperature sensors.

A further advantage of the apparatuses of the present invention is thatthey can be manufactured easily, using automated systems and for massproduction. Many components of the apparatuses can be made by layeringof materials and processing the layers in ways similar to processes usedin manufacturing integrated circuits. By using such processes, vaporsensors of very small sizes can be made. Such small size vapor sensorscan be used in various applications, ranging from physiologicalmonitoring to the control of equipment the performance of which isaffected by the presence or concentration of certain vapors. As anexample, the rate of drying a material wet with water is sensitive tothe water humidity of the air in which the drying takes place.

BRIEF DESCRIPTION OF THE DRAWINGS

The following figures are included to better illustrate the embodimentsof the apparatus and technique of the present invention. In thesefigures, like numerals represent like features in the several views.

FIG. 1 shows an embodiment of a vapor concentration sensor according tothe present invention.

FIG. 2A shows a plan view of a dual-transducer temperature sensor thatcan be used for the vapor sensor of FIG. 1.

FIG. 2B shows a sectional view of a dual-transducer temperature sensorshown in FIG. 2A.

FIG. 2C shows a sectional view of a portion of a wet-transducertemperature sensor of the dual-transducer temperature sensor shown inFIG. 2A.

FIG. 3A shows a plan view in portion of a wet-transducer temperaturesensor having multiple micropores according to the present invention.

FIG. 3B shows a sectional view in portion of the wet-transducertemperature sensor of FIG. 3A.

FIG. 3C shows a sectional view in portion of a wet-transducertemperature sensor having multiple micropores similar to that of FIG. 3Aand FIG. 3B, having an orientation perpendicular to FIG. 3A and FIG. 3B.

FIG. 4A shows a plan view in portion of another embodiment of awet-transducer temperature sensor having multiple micropores accordingto the present invention.

FIG. 4B shows a sectional view in portion of the wet-transducertemperature sensor of FIG. 4A.

FIG. 5A shows a plan view of another embodiment temperature sensor,having a conductor bridge between the transducers of the dual-transducertemperature sensor.

FIG. 5B shows a sectional view of the dual-transducer temperature sensorshown in FIG. 5A.

FIG. 6A shows a plan view of a portion of an apparatus according to thepresent invention, including a temperature sensor for sensing the solidsupport temperature.

FIG. 6B shows a sectional view of the portion of apparatus shown in FIG.6A.

FIG. 6C shows a plan view of a portion of an apparatus according to thepresent invention, including multiple temperature sensors for sensingtemperature of evaporative surfaces of different liquids.

FIG. 6D shows a sectional view of the portion of apparatus shown in FIG.6C.

FIG. 7A shows a plan view of a portion of an apparatus according to thepresent invention, including wet temperature sensors having air gaps forthermally insulating temperature sensing elements.

FIG. 7B shows a sectional view of in portion of the apparatus shown inFIG. 7A.

FIG. 8A shows a plan view of a portion of an apparatus according to thepresent invention, including a connectors for connecting temperaturesensors to gas flow and to electronics.

FIG. 8B shows a sectional view of the portion of the apparatus shown inFIG. 8A.

FIG. 8C shows a sectional view of a portion of the apparatus shown inFIG. 8A and FIG. 8B, oriented at right angle thereto.

FIG. 9A shows a sectional view of a tubular thermocouple junctionaccording to the present invention.

FIG. 9B shows a sectional view of a portion of the thermocouple junctionshown in FIG. 9A.

DETAILED DESCRIPTION OF THE INVENTION

In one aspect, the present invention provides a technique for vaporizinga liquid from a micropore such that the decrease in temperature due tothe absorption of latent heat of evaporation at the evaporation surfacecan be measured to determine the concentration of a vapor of the liquidin a gas.

FIG. 1 shows an embodiment of a vapor sensor of the present inventionfor determining the presence or concentration of the vapor of a volatileliquid in a gas. The vapor sensor (or apparatus) 100 has a“dual-transducer temperature sensor” 114 connected by means of anelectrical cable 116 to a processor 118 for processing the temperaturedata from the dual-transducer temperature sensor 114 to indicate thevapor concentration in the gas. The humidity (or concentration of thevapor) can be displayed in a display device 120 such as a computermonitor, liquid crystal display, light emitting diode display, paperprinter, plotter, galvanometer with a indicator needle, and the like. Asused herein, the term “dual-transducer temperature sensor” refers to asensor having two different transducers—one for sensing the temperatureof a liquid with steady state heat loss in the gas stream due toevaporation of the liquid, and one for sensing the temperature of thegas stream without evaporation. This allows the difference between thetwo temperatures to be determined. It is to be understood that a sensoris considered to be such a dual-transducer temperature sensor if such asensor has two transducers having temperature-dependent properties(e.g., resistance or voltage difference, from which vapor concentrationcan be determined), which can be measured such that such a temperaturedifference can be derived from the properties, even though thetemperatures may not need to be explicitly calculated.

The dual-transducer temperature sensor 114 has a reference temperaturesensor 130 for sensing the temperature of the gas and a wet-transducertemperature sensor 144 for sensing the temperature of a liquid, whichwill lose vapor molecules to the gas by vaporization to the extentdependent on the degree of unsaturation of the vapor of the liquid inthe gas. As used herein the term “wet-transducer temperature sensor”refers to a temperature sensing device, typically electrical, that isused to measure the temperature of the liquid in contact with thetemperature sensor wherein the liquid loses vapor by evaporation to thegas contacting the liquid. As a result, the vicinity of the evaporationsurface cools to a steady state temperature lower than that of the bulkgas (i.e., the bulk of the gas stream whose temperature is notsignificantly affected by the evaporation) due to the latent heat ofevaporation.

FIGS. 2A and 2B shows an embodiment of a dual-transducer temperaturesensor that can be used for the vapor sensor of FIG. 1. In thisembodiment, the dual-transducer temperature sensor 128 has a referencethermocouple 130 exposed to the gas stream 131 for measuring thereference temperature of the gas in the gas stream 131. In thisembodiment, the thermocouple 130 is not wetted by a liquid, thus itstemperature can be referred to as the “dry-transducer temperature.” Thethermocouple 130 is composed of a first dry-transducer metal layer 132and a second dry-transducer metal layer 134 forming a dry-transducerthermocouple junction 136 where the layers 132, 134 contact each other.Wires (not shown in FIG. 2) connected to the thermocouple 130 can beused for transmitting electrical signal representing temperature to theprocessor 118 (i.e., connecting to the first dry-transducer metal layer132 and the second dry-transducer metal layer 134). In a thermocouple,the voltage difference across the thermocouple junction 136 developsdepending on the temperature of the thermocouple junction. This voltagedifference can be measured to determine the temperature experienced bythe thermocouple junction 136. The thermocouple 130 is supported by athermal insulator 137, which in turn is supported by a substrate 138.Preferably, the area of the thermocouple about the thermocouple junction136, which is the heat sensitive part of the thermocouple, is situatedon a gap 140. The gap 140 can be formed (e.g., by chemical etching orlaser ablation) from the substrate 138 and thermal insulator 137. Thegap 140 can be made to be open to the gas stream 131 to provideincreased contact surface area by the gas stream near the thermocouplejunction 136 to facilitate heat transfer from the gas stream to thethermocouple junction 136. Alternatively, the gap 140 may be narrowenough so that the thermocouple junction entirely covers it on theinsulator 137.

In the neighborhood, or vicinity, of the reference thermocouple 130 is a“wet-transducer” temperature sensor, in this case a wet-transducerthermocouple 144. The wet-transducer thermocouple 144 also has two metallayers, i.e., a first wet-transducer metal layer 146 and a secondwet-transducer metal layer 148, forming a wet-transducer thermocouplejunction 150 therebetween. The wet-transducer thermocouple 144, exposedto the gas stream during vapor sensing, is also supported by the thermalinsulator 137. A micropore 154 passes through the thermal insulator 137and the wet second metal layer 148 and the wet first metal layer 146,providing fluid communication from a fluid reservoir 156 to an opening158 into the gas stream 131. The liquid evaporates from a surface 160 inthe opening 158. Heat loss due to the latent heat of evaporation lowersthe temperature at the opening 158 than that sensed by the dry referencethermocouple 130. It is to be noted that the heat insulator layer 137 isoptional. In a case without a heat insulator layer, the substrate 138can support the thermocouples 130, 144 directly, and micropore 154 canpass through the substrate and the wet-transducer thermocouple metallayers 146, 148.

As liquid evaporates from the opening 158, replacement liquid canmigrate from the liquid reservoir 156 via the micropore 154 to theevaporation surface 160, by capillary force, for example. Preferably,the heat sensitive part (i.e., thermocouple junction 150) circumscribesa section of the micropore 154 near to the opening 158 to provideincreased heat transfer from the liquid in the micropore 154 to thewet-transducer thermocouple junction 150. The migration of liquid ispreferably adequate to maintain the liquid evaporation near to theopening 158 substantially constant for a period adequately long for thetemperature of the wet-transducer thermocouple 144 to come to a steadystate temperature after the dual-transducer temperature sensor 128 isput into a gas stream to sense the presence or quantity of a vapor inthe gas stream. Wires (not shown in the figures) can be used to connectthe wet-transducer thermocouple 138 to electronics for determining thetemperature thereof or for comparing with data collected from the drythermocouple 130.

FIG. 2C shows in more detail the micropore 154 and the evaporationsurface 160 thereof. Arrow A shows the flow of gas in the gas stream.Arrows B show the replacement liquid flowing toward the evaporationsurface 160 through the micropore 154. Although the application of thepresent invention is not dependent on any particular scientific theory,it is believed that a boundary layer of gas saturated with the vaporexists at the evaporation surface 160. The concentration of the vaporgradually decreases with the distance from the evaporation surface 160.Mass transfer in evaporation from a liquid surface in a gas stream hasbeen extensively studied and is well understood by one skilled in thechemical engineering principles.

It is preferred that the micropore will have adequate capillary force todraw liquid from the liquid reservoir 156 to the opening 158 withoutbeing rate limiting. Preferably, as the liquid evaporates from theopening 158, adequate amount of liquid can flow (e.g., by capillaryforce) from the liquid reservoir 156 to allow the wet-transducerthermocouple 144 to come to a steady state temperature once placed in adesired location. For example, in the case of a humidity sensor, undernormal operating conditions of the vapor sensor 100, between about 1° C.and 45° C. for relative water humidity of about 1% to 100% saturation,being not water-mass-transfer-limited, the micropore 154 will have ahigher rate of evaporation at a lower relative humidity in the gasstream than at a higher relative humidity at the same dry temperature.The reference thermocouple 130 and the wet-transducer thermocouple 144are held in close proximity of each other by the thermal insulator 137and the substrate 138 such that they sense the temperature of gasportions that are close enough to have essentially the samepre-evaporation temperature and humidity. Typically, the referencethermocouple 130 is located upstream of the wet-transducer thermocouple144 so that the reference thermocouple will not be affected by liquidevaporation.

Another embodiment of the sensor for determining vapor concentration ina gas is shown in portion in FIGS. 3A and 3B. In these figures, thearrow A shows the direction of flow in the gas stream. In thisembodiment, the wet temperature sensor includes a plurality ofmicropores 158B are each connected to the liquid reservoir 156 forsupplying the liquid to the openings of the micropores 158B forevaporation. The micropores 158B pass through a thermocouple junction150B to the openings 160B. Such a plurality of micropores will provide alarger ratio of evaporating surface area to thermocouple junction area,thereby enabling the heat transfer to achieve a steady state faster forany change in the characteristics of gas stream. FIG. 3C is a sectionalview of another embodiment similar to that of FIGS. 3A and 3B, exceptwith a different number of micropores 158C and the sectional view isequivalent to one perpendicular to those of FIGS. 3A and 3B.

FIGS. 4A and 4B show another embodiment with multiple microporesconnected to the same liquid reservoir. In this embodiment, the metallicmaterials, which are thermal conductors, that connect the thermocouplejunction 150D to other electronics is reduced to decrease the amount ofheat transfer that is not originated from the evaporation from themicropores. In the regions 164, 165 outside the area of the thermocouplejunction 150D having micropores 158D, the “wet” first metal layer 146and the “wet” second material layer 148 are reduced in size to becomebridges 168, 170 to reduce heat transfer therethrough. In this way, theisolation of the thermocouple junction region of the wet-transducertemperature sensor from undesirable external influence is improved.

Although it is useful to obtain the temperature of the gas stream withthe reference temperature sensor and the temperature with evaporativeheat loss from the liquid in the micropore literally, the concentrationor presence of a vapor in the gas stream can be conveniently determinedby merely measuring the difference in electrical property between thedry transducer and the wet transducer without actually determining thesetemperatures numerically. In FIGS. 5A and 5B, the second wet-transducermetal layer 148 of the wet-transducer thermocouple 144 is in electricalcontact with the second dry-transducer metal layer 134 through thebridge conductor 171. Preferably, the second dry-transducer metal layer134, the bridge conductor 171, and the second wet-transducer metal layer148 are all made of the same metal, thus obviating the problem of havingto determine the voltage difference due to temperature change on ajunction between these second metal layers 134, 148. Further, it ispreferred that the first dry-transducer metal layer 132 and the firstwet-transducer metal layer 146 are made of the same metal, which wouldsignificantly reduce the complexity of the manufacturing process. Withthis arrangement, to determine the difference between the temperaturesmeasured by the dry-transducer reference thermocouple 130 and thewet-transducer thermocouple 144, only the voltage between the firstwet-transducer metal layer 146 and the first dry-transducer metal layer132 need to be measured. Thus, the temperature difference between thewet-transducer thermocouple 144 and the dry-transducer thermocouple 130can be measured with only two conductor leads, since no conductor leadis needed for the second dry-transducer metal layer 134 or the secondwet-transducer metal layer 148.

In an alternative embodiment shown in FIGS. 6A and 6B, in additional tothe wet-transducer thermocouple 144 and the dry-transducer referencethermocouple 130 similar to those described above, there is also a solidcontact thermocouple 162 that senses the temperature of the solidsupport in contact with the dry-transducer reference thermocouple 130and the wet-transducer thermocouple 144. As previously described, thedry-transducer reference thermocouple 130 preferably has a gap 140 underthe thermocouple junction 136 to facilitate heat transfer from the gasstream A to the thermocouple junction 136. In contrast, the solidcontact thermocouple 162 is preferably in direct contact with thesupport layer (in the case of FIG. 6, the thermal insulator 137 so thatany difference between the air stream temperature and the support layertemperature can be measured and compensated for in the vaporconcentration determination. The solid contact thermocouple 162preferably contains a first metal layer and a dissimilar second metallayer, which can be the same materials as the first and second metallayer in either the dry-transducer thermocouple 136 or thewet-transducer thermocouple 144.

FIG. 6C and FIG. 6D show another embodiment of a vapor sensor in whichtwo different vapors can be sensed. In this sensor, a first liquidreservoir 156 can contain a first liquid. This first liquid will beevaporated from a first micropore 154 into the gas stream A at a firstwet-transducer thermocouple 144. A second liquid will be evaporated froma second liquid reservoir 156A into the gas stream A from a secondmicropore 154A at a second wet-transducer thermocouple 144A. A dryreference thermocouple 130 measures the gas stream temperature withoutevaporation and a solid contact thermocouple 162 measures thetemperature of the solid support of the thermocouples. For clarity, inFIG. 6D, the details structures of the thermocouples and supportstructures are not shown.

To further reduce the effect of conductive heat transfer from solidstructures near the micropore, even better heat insulation than thethermal insulator layer 137 can be provided. FIGS. 7A and 7B show inplan view gaps 164 interposing between the thermal insulator layer 137and the wet-transducer thermocouple junction 150 over substantial areasaround the micropores 154, with the exception of the luminal wall 166.The gap 164 can be filled with gas from the gas stream that is beingsensed. Vents 168 open to the gas stream permit the gas to fill the gaps164. Alternately, the gap 164 can be filled with a different gas (e.g.,one with lower thermal conductivity or heat capacity) and the ventssealed to trap that gas in the gap 164.

FIGS. 8A and 8B show an apparatus in which the dual-transducertemperature sensor described above is used in conjunction withconnecting structures. As shown, a dual-transducer temperature sensor114A is disposed in the path of a gas stream A in a gas flow channel170. The exit end 172 of the gas flow channel 170 is connected via apump connector 174 to a gas pump (not shown) for drawing gas through thedual-transducer temperature sensor 114A. Preferably the dual-transducertemperature sensor is constructed as a module 176 that permitsconnecting to upstream channel 177 of the gas stream A and pumpconnector 174, as well as connecting to electrical leads. An electricalconnector 178, having leads 180A, 180B, 180C, 180D for connecting withthe metal layers 134, 132, 148, 146, respectively, can be used toprovide electrical communication to the dry-transducer referencethermocouple 130 and wet-transducer thermocouple 144. It is contemplatedthat module 176, as well as the structures connected thereto, includingthe gas channel upstream, the pump connector 174, and the electricalconnector 178 are constructed to allow the various pieces to fittogether by “snap-on” fittings so that no elaborate securing mechanismssuch as screw, clamps, rivets, adhesive, and the like are needed. FIG.8C shows a sectional view perpendicular to those of FIG. 8A and FIG. 8B.

FIG. 9A shows another embodiment of a vapor sensor in which microporesare present in a tubular thermocouple junction. In this case, thethermocouple junction, at which two metals meet, wraps around to resultin a shape of the surface of a cylinder, i.e., a tubular thermocouplejunction. FIG. 9B shows a portion of the tubular thermocouple junctionwith the adjacent layers in cross-section. In FIGS. 9A and 9B, thethermocouple junction 182 is tubular and is made of a first metal layer184A and a second metal layer 184B. The two tubular layers 184A and 184Bextend from two different ends towards each other and contact andoverlap at a portion 184C. The lumen 185 of the tubular thermocouplejunction 182 is filled with the liquid whose vapor is being detected. Aninsulator layer 187 is shown, insulating the metal layers 184A and 184Bfrom the liquid in the lumen 185. Micropores (or perforations) 186traversing from the liquid through the insulator layer 187 and the metallayers 184A, 184B are present at the thermocouple junction 182 to allowthe liquid to pass from the lumen 185 through the tubular thermocouplejunction 182 to the outside surface for evaporation. The gas stream,represented by the arrows D flows pass the thermocouple junction 182 andvaporized the liquid from the micropores 186 in the thermocouplejunction 182. The evaporative cooling at the vicinity of the microporesis measured via leads connected to the two ends of the tube and to athermocouple output meter. Practically, the metal layers of thethermocouple junction 182 can be formed by deposition on an insulatortube. However, the insulator tube is not necessary for the thermocouplejunction to work and thus the thermocouple junction can be formed byother means, such as forming a metallic tube on a tube of another metalfor thermocouple junction.

Making the vapor sensors

The vapor sensors of the present invention are well suited forfabrication by automated processes. In some preferred embodiments, sincethe dual-transducer temperature sensors of the present invention areprimarily made of layered materials, they are particularly adaptable formanufacturing processes well known in integrated circuit fabrication.For example, the substrate 138 can be silicon, silicon dioxide,polysilicon, silicon nitride, and the like; the thermal insulator 137can be silicon nitride, polyimide, or other suitable polymers of lowthermal conductivity; the metal layers for thermocouples can be anybimetallic layer combinations suitable for thermocouple constructions.

As stated previously, methods for fabricating semiconductors can beemployed for construction of the layered structures for forming thesubstrate, thermal insulator, the thermocouples, and the like of thepresent invention. As an illustration, an embodiment of thedual-transducer temperature sensor can be made with a silicon substrate,a SiO₂ sacrificial layer for etching depressions and cavities in thesilicon, a polyimide layer for the thermal insulator, copper versusconstantan for the thermocouple bimetallic layers.

Bimetal layer combination for thermocouples are known in the art, suchas platinum versus rhodium, copper versus constantan, iron versusconstantan, nickel-chromium alloy versus nickel-aluminum alloy, and thelike. For a list of materials suitable of thermocouple construction, seeManual on the use of Thermocouples in Temperature Measurement, ASTMmanual STP 470B, 1981. Other materials suitable for thermocouples arereported by Julian Gardner, Microsensor, Principles and Applications,ch. 5, John Wiley and Sons, 1994. Methods for laying metallic layers andetching them to achieve the desired dimensions are known in the art.

As is known in the art, glass and SiO₂ can be etched with suitablechemicals, e.g., buffered hydrofluoric acid (HF) mixtures; silicon canbe etched with potassium hydroxide (KOH), preferably with tetramethylammonium hydroxide (TMAH); glass, SiO₂, polysilicon, and silicon nitridecan be dry-etched with plasma chemistry known to one skilled in the art;and silicon nitride can also be wet-etched with phosphoric acid (H₃PO₄).It is also known that these etching methods affect each material (e.g.,silicon, silicon nitride, polysilicon, SiO₂, NiFe) differently. Thisdifference is due to the materials' inherent physical and chemicalproperties. The different etch rates for such materials using a widevariety of etchants will allow the ability to etch differentially onematerial quickly and another very slowly. Such differences in etchingrate can be advantageously used for making cavities, reservoirs, and thelike.

Etching methods for forming structures (including microstructures) andetching materials used in solid-state semiconductor technology are knownin the art. Examples of methods for forming microstructures include,e.g., Judy and Muller, “Magnetic Microactuation of Torsional Polysiliconstructures,” Dig. Int. Conf Solid-State Sensors and Actuators,Stockholm, Sweden, Jun. 25-29, 1995, pp. 332-339; and Pister et al.“Microfabricated Hinges,” Sensors and Actuators, A. 33, 1992, pp.249-256, of which the description on methods of making microstructuresare incorporated by reference herein.

Methods for etching silicon dioxide are described in Steinbruchel etal., “Mechanism of dry etching of silicon dioxide—A case study of directreactive ion etching,” J. Electrochem. Soc. Solid-state and Technology,132(1), pp. 180-186, Jan. 1985; and Tenney et al., “Etch Rates of DopedOxide in Solutions of Buffered HF,” J. Electrochem. Soc. Solid State andTechnology, 120 (8), pp. 1091-1095, Aug. 1973. Polysilicon etching isdescribed by Bergeron et al., “Controlled Anisotropic Etching ofPolysilicon,” Solid State Technologies, August 1982, pp. 98-103; and B.L. Sopori, “A New Defect Etch for Polycrystalline Silicon,” J.Electrochem. Soc. Solid State and Technology, 131 (3), pp. 667-672, Mar.1984. Silicon nitride etching is described by van Gelder et al., “Theetching of Silicon Nitride in Phosphoric Acid with Silicon Dioxide as amask”, J. Electrochem. Soc. Solid State and Technology, 114 (8), Aug.1967, pp. 869-872. Silicon etching is described by M. J. Declercq, “ANew CMOS Technology Using Anisotropic Etching of Silicon,” IEEE J. ofSolid State Circuits, Vol. SC-10, No. 4, Aug. 1975, pp. 191-196; K. E.Bean, “Anisotropic Etching of Silicon,” IEEE Trans. Electron. Devices,Vol. ED-25, No. 10, Oct. 1978, pp. 1185-1193; Osamu Tabata,“pH-controlled TMAH etchants for silicon micromachining,” Sensors andActuators, A53, 1996, pp. 335-339, and Robbins, et al., “ChemicalEtching of Silicon II. The system of HF, HNO₃, H₂O, and HC₂H₃OO₂ ,” J.Of The Electrochemical Society, 107 (2), Feb. 1960, pp. 108-111. Theseetching methods are incorporated by reference herein.

An example of the thermal insulator is polyimide, e.g., PI-2611 fromDuPont Company (Wilmington, Del.). A polyimide layer is typically formedby spinning. Such a layer can be etched by dry plasma etching. Polyimidematerials suitable for such applications are available commercially fromchemical suppliers such as DuPont Company and Ciba Geigy Corp.(Greensboro, N.C.). Methods of spinning and etching a polyimide layerare known in the art. See, e.g., Ahn, et al., “A Planar VariableReluctance Magnetic Micromotor with Fully Integrated Stator And WrappedCoils,” Proc. IEEE Micro Electro Mechanical Systems (MEMS '93), FortLauderdale, Fla., Feb. 7-10, 1993. Other polymeric material, such aspolyolefin, acrylic material, styrene-based polymers, etc., known to oneskilled in the art can be used.

As previously described, other electrical temperature sensing devicesand materials, such as thermistors, can be used in place ofthermocouples for sensing temperature differences and providingelectrical signals for calculating vapor concentration or determiningthe presence or absence of a vapor in the gas stream. Suitablethermistors include miniature beads or strips of sintered oxides such asbarium oxide or strontium oxide and their mixtures in variousproportions. These beads or strips are typically coated with a thinlayer of glass to protect them from the ambient. The beads and stripsare typically connected with platinum/indium leads which are connectedin a circuit to measure the electrical resistance of the bead or strip.The strips or beads can be formed by pressing together the appropriatesintered oxides and then encapsulating them in a glass layer. The stripsof thermistors can be made so that they have micropores passing throughthem, each micropore to an opening for liquid vaporization. Thermistorsand methods of making them are known in the art.

A device with tubular heat sensors, e.g., one that is shown in FIG. 9A,can be made, for example, by first forming a support tube and thendepositing the thermocouple junction on the tube and subsequentlyforming the micropores on the tube as well as the thermocouple junction.The thermocouple junction can be formed by coating with the two metalssequentially. One can also coat the support tube with a thermistormaterial for forming a thermistor for temperature measurements duringevaporative heat loss. Micropores can be formed on the tube withperforating tools and techniques such as drilling, etching, and laserablation. The micropores can also be formed by masking before the metallayers are deposited.

Using the vapor sensor

A vapor sensor of the present invention can be used in a gas stream tomeasure the vapor concentration of a liquid or the presence of the vaporin the gas stream relatively independent of the velocity of the gasstream. Although water-humidity examples are described in more detail inthis disclosure, it is to be understood that a vapor sensor according tothe present invention can be made to sense the concentration of thevapor of other liquids, such as organic liquids including alcohols,e.g., ethanol, methanol, propanol, isopropanol, butanol; ketone, e.g.,acetone; aldehyde, e.g., formaldehyde; aromatic liquid, e.g., benzeneand toluene; chlorinated organic such as carbon tetrachloride, and thelike. For convenience of description, as used herein, the term“humidity” refers to the degree of saturation of a vapor of a liquid ina gas, wherein the vapor may be water vapor or a vapor of other liquidsand the gas may be air or other gases. In a more specific sense, as inequations herein, humidity refers to the concentration of the vapor inthe gas expressed as mass of the vapor in unit mass of a vapor-free gas.

To use a vapor sensor of the present invention, a look up table, graph,or computer database can be obtained by calibrating a vapor sensor witha specific kind of dual-transducer temperature sensor with conditionscorresponding to various concentrations and temperatures in a specificgas. For example, a psychrometric chart or graph for water vapor in aircan be obtained by calibrating a humidity sensor with different samplesof air having a variety of water vapor concentration in air at differenttemperature. Furthermore, such data can be stored electronically in adigital computer such that the electrical signals generated by thereference temperature sensors and the wet-transducer temperature sensorscan be correlated with the vapor concentration in the gas sample andtemperature. The computer can be programmed to indicate thecorresponding vapor concentration depending on the electrical signals ofthe reference and wet-transducer temperature sensors. As used herein,the terms “psychrometry” and “psychrometric” refers to the determinationof the concentration of a vapor of a vaporizable (i.e., volatile) liquidin a gas. Examples of vaporizable (volatile) liquids are those that havea vapor pressure at room temperature of 0.1 mmHg or above. A personskilled in the art will understand that, knowing the electrical propertyof the temperature sensors, the electrical signals therefrom can be usedfor calculating the vapor concentration without literally calculatingthe temperatures numerically.

The theory of psychrometry is known in the art. For example,publications such as McCabe and Smith, Unit Operations of ChemicalEngineering, McGraw-Hill, Ch. 24, 3rd ed, (1956) and Robert Perry (ed.),Chemical Engineers' Handbook, Chapters on “Psychrometry” and “Solidsdrying fundamentals,” McGraw-Hill (1963) describe humidificationoperations, psychrometric charts, and the theory of wet-bulb temperatureversus dry-bulb temperature. Briefly, the dry-transducer temperature,corresponding to the dry-bulb temperature of McCabe or Perry, asmeasured by the reference temperature sensor in the present invention,represents the temperature of the gas in which the vapor content is tobe determined. The wet-transducer temperature, corresponding to thewet-bulb temperature of McCabe or Perry, is the steady state,non-equilibrium temperature reached by a small mass of liquid underadiabatic conditions in a continuous stream of gas. In the presentinvention, as long as the liquid does not move past the wet-transducertemperature sensor in an excessive rate, the conditions approximates anadiabatic condition to the vapor sensor to be functional.

When the dual-transducer temperature sensor is placed in a gas stream,initially the temperature of the wet-transducer temperature sensor isabout equal to or would tend to approach that of the gas, much as whatthe reference temperature sensor would do. If the gas is not saturatedwith the vapor of the liquid in question, liquid would evaporate fromthe liquid surrounding the wet-transducer temperature sensor. Becausethe condition is adiabatic, the latent heat of vaporization is suppliedfrom the wet-transducer temperature sensor and the surrounding air. Asthe temperature of the wet-transducer temperature sensor falls belowthat of the gas, sensible heat is transferred from the gas to thewet-transducer temperature sensor and the liquid at the microporeopening. Eventually a steady state is reached, at which point the heatsupplied by the gas to the wet-transducer temperature sensor and to theliquid is equal to the heat loss by evaporation of the liquid in thevicinity of the wet-transducer temperature sensor. At this point thewet-transducer temperature sensor settles at a temperature, thewet-transducer temperature. For the steady state to occur in a conditionbetter suited for measuring vapor concentration, it is preferred thatthe velocity of the gas passing over the wet-transducer temperaturesensor be adequately high so that radiation heat transfer is smallcompared to conduction and convention heat transfer between the gas andthe liquid, and that the surface area from which water can evaporatestays constant.

Now, the energy transfer of psychrometry will be described. It is notedalthough water evaporation is used as an illustrative example, and theterm “humidity” is used, the mathematics is equally applicable to otherliquids, as is evident to one skilled in the art. The heat transfer canbe represented by the following equation:

q=MN{L _(w) +C(t−t _(w))}  (1)

where q is the rate of sensible heat transferred to the liquid, M is themolecular weight of the vapor evaporated from the liquid, N is the molarrate of transfer of vapor, L_(w) is the latent heat of vaporization ofthe liquid, C is the heat capacity of the vapor, t is the temperature ofthe gas, and t_(w) is the wet-transducer temperature. Because the valueof the term “C(t−t_(w))” is usually very small compared to L_(w) in Eq.(1), the relationship between humidity and the wet and dry-transducertemperature can be shown by the following equation:

(H−H _(w))L _(w) =−K(t−t _(w))  (2)

where H is the humidity in question, H_(w) is the saturation humidity atthe wet-transducer temperature t_(w), L_(w) is the latent heat ofevaporation of the vaporization of the liquid at temperature t_(w), andK is a constant that depends on the molecular weight of the dry gas, theheat transfer coefficient, and the mass transfer coefficient between theliquid and the gas.

Data for different conditions on the parameters in Eq. (2) can beobtained by routine experimentation by one skilled in the art. Such datafor some common liquid and vapor mixtures are available in theliterature. For example, psychrometric data in graphical form areavailable for air-water mixture, air-benzene, air-toluene, air-carbontetrachloride in Perry, supra. Based on such data, after obtaining thereference temperature and wet-transducer temperature, one can determinethe humidity (i.e., vapor concentration in the gas) by looking up thedata. Knowing the temperature of, the gas stream, relative humidity (in%) and absolute humidity (in mass of vapor per unit mass of gas) can beconverted to each other.

Furthermore, Eq. (2) can be programmed in a computer, e.g., anelectronic digital computer, microprocessor, and the like, forindicating the humidity (i.e., vapor concentration) based on thereference temperature (i.e., dry-transducer temperature) and thewet-transducer temperature. For determining the concentration of a vaporother than water in a gas, the material, e.g., bimetallic thermocouplematerial, thermal insulator, and the like, which may contact the liquidshould be selected to be compatible with the liquid and vapor, as wellas the gas in which the dual-transducer temperature sensor is to beused. Further, the algorithm for the calculation of temperature, vaporconcentration, the control of equipment, or direct conversion fromelectrical signals from the temperature sensors to vapor concentration,etc., can be stored in a computer, chips, storage devices ( such asfloppy disks, hard disks, compact disks, tapes), and the like for longor short term storage.

The vapor sensor of the present invention can be adapted in anembodiment to be used as a conventional humidity sensor for measuringwater humidity in atmospheric air, much like the conventional dry andwet bulb humidity sensor, with the exception that instead of a wick,micropores in close proximity to temperature transducers are used. Otherembodiments can be adapted to measure the concentration of, e.g.,organic vapors in gas streams. In these cases, any organic materialsused, e.g., thermal insulators, are selected to be compatible with thegas and vapor and such that the heat and mass transfer are adequate forthe vapor sensor (which in these cases measure temperature relating tothe non-aqueous vapor concentration) to function properly. For liquidsthat vaporize faster than water at a particular temperature, e.g., roomtemperature of about 25° C., adequate micropores in the apparatus shouldbe provided to transfer liquid at an adequate rate so as not tomass-transfer-limit the apparatus.

Such vapor sensors can be used in a wide variety of applications. Forexample, they can be used in traditional humidity measurement forweather reporting, for monitoring gas in a chemical plant, for measuringgases in a patients breath, as well as for detection of vapor formonitoring a drying process.

Although the preferred embodiment of the present invention has beendescribed and illustrated in detail, it is to be understood that aperson skilled in the art, based on the present disclosure, can makemodifications within the scope of the invention.

What is claimed is:
 1. A sensor for sensing in a gas stream a vapor of aliquid, comprising: a micropore having an evaporation end and having alumen to conduct liquid from a supply of the liquid for evaporation atthe evaporation end; and a wet temperate sensor having a heat sensitivepart in contact with the liquid in the micropore, the heat sensitivepart circumscribing the micropore and forming part of the lumen, whereinheat loss due to evaporation of the liquid when the wet temperaturesensor wet with the liquid is placed in the gas stream will result inthe temperature sensed by the wet temperature sensor being lower thanthe non-evaporative temperature of the gas stream sensed by at least onereference temperature sensor, the lowering in temperature beingmeasurable to determine the concentration of the vapor in the gasstream.
 2. The sensor according to claim 1 comprising a plurality of themicropores neighboring one another and supplied by a common liquidreservoir to increase heat transfer to the wet temperature sensor. 3.The sensor according to claim 1 wherein the heat sensitive part has theform of a layer having two sides wherein the micropore passes throughthe heat sensitive part from one side to the other side.
 4. The sensoraccording to claim 3 wherein the layer-form heat sensitive part issupported by a heat insulator layer which thermally insulates the heatsensitive part from the reservoir, the micropore traversing through theheat insulator to have liquid communication with the liquid reservoir.5. The sensor according to claim 4 wherein the heat sensitive part isone of a thermocouple junction and a thermistor.
 6. The sensor accordingto claim 3 wherein the heat sensitive part comprises a surface junctionformed between a layer of a first material and a layer of a secondmaterial, said surface junction having electrical property that changesaccording to temperature, and wherein the micropore traverses throughsaid layers of first material and second material.
 7. The sensoraccording to claim 4 further comprising a substrate defining the liquidreservoir, a heat insulator layer interposing between the heat sensitivepart and the substrate, and further comprising additional plurality ofmicropores traversing through the heat sensitive part to the liquidreservoir to increase evaporation for achieving steady state temperatureat the wet temperature sensor.
 8. The sensor according to claim 4further comprising a plurality of wet temperature sensors and sets ofmicropores, each set being sensed by a different wet temperature sensorand in liquid communication with a reservoir of a different liquid, suchthat the temperature of liquid evaporating in each set can be comparedto the temperature sensed by at least one reference temperature sensorto determine the vapor concentration of each of said liquids.
 9. Thesensor according to claim 8 wherein each set of micropores comprises aplurality micropores supplied with the same liquid.
 10. The sensoraccording to claim 7 further comprising a gas including gap interposingbetween the heat insulator layer and at least a portion of heatsensitive part to reduce conductive heat transfer through solid to theheat sensitive part.
 11. The sensor according to claim 6, wherein thereference temperature sensor comprises a heat sensitive part including asurface junction of a layer of a third material and a layer of a fourthmaterial wherein the electrical property of the surface junction changesaccording to a change in the non-evaporative temperature of the gasstream.
 12. The sensor according to claim 11 wherein the second materialis the same as the fourth material, the layer of second material in thewet temperature sensor being electrically connected to the layer offourth material in the reference temperature sensor such that thedifference in electrical signal between the layer of the first materialin the wet temperature sensor and the layer of the third material in thereference temperature sensor is indicative of the temperature differencebetween the wet temperature and the reference temperature.